Applications of High Density Plasma to Optical Micromachines
نویسندگان
چکیده
منابع مشابه
MEMS Technology -- Micromachines Enabling the “All Optical Network"
* Formerly with Lucent Technologies/Agere Systems (Breinigsville, PA) Abstract Research on micromachines or MEMS technology has been ongoing for more than a decade. Early work focused on biomedical, printing and airbag applications. Only recently has this technology been applied to telecommunications networks. This new micro-optics technology, known as Optical MEMS, is enabling a new generation...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2007
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.73.980